Backscattering method

Author: revazi kutelia
Keywords: Ruserford, impurity, massive, film
Annotation:

The method, based on a Ruserford’s well known formula, is described in this article. The method gives ability to study impurity distribution in the massive materials and also in thin films (100-500nm). It is shown, given method is able to explore and distinguish isotopic contents of light elements (small atomic numbers) in a sample.